
Sic Rb+C Seal Rings for Pump with ISO 9001
We produce and supply processed graphite products for application of semiconductor industry.
Description
We rely on the continuous development of the company, so that all employees in both material and spiritual satisfaction, while continuing to contribute to the development of the social plastic packaging graphite purification, graphite electrode RP 200mm, Graphite Electrode industry. We continue to develop towards polyglot, to strive for excellence, to push ourselves towards the best global indicators. We are committed to technology research and development and innovation, to open up the global market, and our marketing network covers all parts of the country.
We produce and supply processed graphite products for application of semiconductor industry. We have several CNC machining centers with high revolutions to ensure mechanical tolerance, and we have three coordinate measuring instruments, which can check the tolerance of processed work pieces to ensure the measurable quality. At the same, we have the state of the art purification furnaces, which can purify the processed products to ash content less than 2PPM.
Product parameters of our material for graphite hot zone for semi-con
|
Grade |
Bulk Density |
Specific Resistance |
Flexural Strength |
Compressive Strength |
Ash (Normal) |
Ash (purified) |
Grain Size |
|
g/cm³ |
μΩ.m |
MPa |
MPa |
% |
ppm |
μm |
|
|
IS-11 |
1.83 |
11~13 |
50 |
115 |
0.05 |
50 |
8~10 |
|
IS-12 |
1.90 |
11~13 |
61 |
135 |
0.05 |
50 |
8~10 |
|
IS-13 |
1.78 |
≤13 |
46 |
86 |
0.05 |
50 |
- |
|
IS-14 |
1.86 |
11~12 |
65 |
135 |
0.05 |
50 |
5 |
|
IS-22 |
1.80 |
13~14 |
55 |
100 |
0.02 |
- |
8 |
|
IS-23 |
1.86 |
9~12 |
55 |
110 |
0.05 |
- |
13 |
|
IS-31 |
1.79 |
11-13 |
38 |
78 |
0.05 |
- | - |
|
IS-32 |
1.85 |
11-13 |
45 |
100 |
0.05 |
- | - |
Note: These are reference data, not guaranteed data.
Product Description
Components used in semiconductor environment have high requirements for particle size. It not only needs to apply the good physical properties of graphite, such as high temperature resistance, corrosion resistance and plasma resistance, but also has high requirements for the purity and machining accuracy of graphite.
We use imported purification equipment of international well-known brands, which can extract the purity of graphite processed parts to 5-50PPM, and the ash content of specially ordered products can be less than 2PPM.
The main applications include graphite thermal field in semi-con single crystal furnace, including heating element, crucible, insulation cylinder, packaging fixture, etc.
Basic production steps
|
Raw material crushing |
Screening |
Premix and knead |
CIP Molding |
|
Baking |
Impregnation |
Rebaking |
Graphitization |
|
CNC Machining |
Purification |
inspection |
packaging |
Packaging and shipping
We carry out vacuum packing for high purity products. At the same time, customized packaging of graphite hot zone for semi-con according to customer needs, wooden box, pallet packaging methods are available.

According to the cargo weight and delivery requirements, choose the most cost-effective transportation method, express, sea, airway, railway, multimodal transportation are available.

From the beginning of assembling individual parts to presenting a truly complete product, we are committed to creating Sic Rb+C Seal Rings for Pump with ISO 9001 that is generous and durable. The products to assure years of trouble-free service has attracted a great deal customers. We provide professional services, from product positioning, R&D to operation, with outstanding strength and services.
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