
Silicon Carbide Shell and Tube Heat Exchanger
We produce and supply processed graphite products for application of semiconductor industry.
Description
Our company has the most advanced production equipment, can produce a variety of specifications, tonal Vacuum furnace hot zone, Graphite Tubular heat exchanger, graphite electrode HP 400mm. We uphold the concept that the interests of our customers are paramount, and always insist on the priority of our customers in handling all relationships with them. We uphold the passion and excellence corporate philosophy, insist on taking the road of modern enterprise development through years of unremitting efforts. We have a clear strategy, standardized governance, sound operation and quality service.
We produce and supply processed graphite products for application of semiconductor industry. We have several CNC machining centers with high revolutions to ensure mechanical tolerance, and we have three coordinate measuring instruments, which can check the tolerance of processed work pieces to ensure the measurable quality. At the same, we have the state of the art purification furnaces, which can purify the processed products to ash content less than 2PPM.
Product parameters of our material for graphite hot zone for semi-con
|
Grade |
Bulk Density |
Specific Resistance |
Flexural Strength |
Compressive Strength |
Ash (Normal) |
Ash (purified) |
Grain Size |
|
g/cm³ |
μΩ.m |
MPa |
MPa |
% |
ppm |
μm |
|
|
IS-11 |
1.83 |
11~13 |
50 |
115 |
0.05 |
50 |
8~10 |
|
IS-12 |
1.90 |
11~13 |
61 |
135 |
0.05 |
50 |
8~10 |
|
IS-13 |
1.78 |
≤13 |
46 |
86 |
0.05 |
50 |
- |
|
IS-14 |
1.86 |
11~12 |
65 |
135 |
0.05 |
50 |
5 |
|
IS-22 |
1.80 |
13~14 |
55 |
100 |
0.02 |
- |
8 |
|
IS-23 |
1.86 |
9~12 |
55 |
110 |
0.05 |
- |
13 |
|
IS-31 |
1.79 |
11-13 |
38 |
78 |
0.05 |
- | - |
|
IS-32 |
1.85 |
11-13 |
45 |
100 |
0.05 |
- | - |
Note: These are reference data, not guaranteed data.
Product Description
Components used in semiconductor environment have high requirements for particle size. It not only needs to apply the good physical properties of graphite, such as high temperature resistance, corrosion resistance and plasma resistance, but also has high requirements for the purity and machining accuracy of graphite.
We use imported purification equipment of international well-known brands, which can extract the purity of graphite processed parts to 5-50PPM, and the ash content of specially ordered products can be less than 2PPM.
The main applications include graphite thermal field in semi-con single crystal furnace, including heating element, crucible, insulation cylinder, packaging fixture, etc.
Basic production steps
|
Raw material crushing |
Screening |
Premix and knead |
CIP Molding |
|
Baking |
Impregnation |
Rebaking |
Graphitization |
|
CNC Machining |
Purification |
inspection |
packaging |
Packaging and shipping
We carry out vacuum packing for high purity products. At the same time, customized packaging of graphite hot zone for semi-con according to customer needs, wooden box, pallet packaging methods are available.

According to the cargo weight and delivery requirements, choose the most cost-effective transportation method, express, sea, airway, railway, multimodal transportation are available.

Our company adheres to the concept of innovation and development, invests heavily in technological innovation in Silicon Carbide Shell and Tube Heat Exchanger, and has achieved rapid development in recent years. We open multiple promotion channels, create equal development opportunities, and encourage employees to develop through their own efforts. We are committed to the transformation and upgrading of the national industry, and strive for the realization of a world-class enterprise.
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