Graphite Hot Zone for Semi-con

We produce and supply processed graphite products for application of semiconductor industry.

Description

Graphite hot zone for semi-con high purity graphite product

We produce and supply processed graphite products for application of semiconductor industry. We have several CNC machining centers with high revolutions to ensure mechanical tolerance, and we have three coordinate measuring instruments, which can check the tolerance of processed work pieces to ensure the measurable quality. At the same, we have the state of the art purification furnaces, which can purify the processed products to ash content less than 2PPM.

Product parameters of our material for graphite hot zone for semi-con

Grade	Bulk Density	Specific Resistance	Flexural Strength	Compressive Strength	Ash (Normal)	Ash (purified)	Grain Size
Grade	g/cm³	μΩ.m	MPa	MPa	%	ppm	μm
IS-11	1.83	11~13	50	115	0.05	50	8~10
IS-12	1.90	11~13	61	135	0.05	50	8~10
IS-13	1.78	≤13	46	86	0.05	50	-
IS-14	1.86	11~12	65	135	0.05	50	5
IS-22	1.80	13~14	55	100	0.02	-	8
IS-23	1.86	9~12	55	110	0.05	-	13
IS-31	1.79	11-13	38	78	0.05	-	-
IS-32	1.85	11-13	45	100	0.05	-	-

Note: These are reference data, not guaranteed data.

Product Description

Components used in semiconductor environment have high requirements for particle size. It not only needs to apply the good physical properties of graphite, such as high temperature resistance, corrosion resistance and plasma resistance, but also has high requirements for the purity and machining accuracy of graphite.

We use imported purification equipment of international well-known brands, which can extract the purity of graphite processed parts to 5-50PPM, and the ash content of specially ordered products can be less than 2PPM.

The main applications include graphite thermal field in semi-con single crystal furnace, including heating element, crucible, insulation cylinder, packaging fixture, etc.

Basic production steps

Raw material crushing	Screening	Premix and knead	CIP Molding
Baking	Impregnation	Rebaking	Graphitization
CNC Machining	Purification	inspection	packaging

Packaging and shipping

We carry out vacuum packing for high purity products. At the same time, customized packaging of graphite hot zone for semi-con according to customer needs, wooden box, pallet packaging methods are available.

According to the cargo weight and delivery requirements, choose the most cost-effective transportation method, express, sea, airway, railway, multimodal transportation are available.

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